Phone: 510-9181896

Wafer Polishing Plates

Ceramic wafer polishing plates are excellently chemical resistant with minimal deformation, high thermal conductivity and low thermal expansion coefficient.

Currently we are now supplying wafer polishing plates made from fine Alumina or Silicon Carbide with convex, flat or concave shapes.

The inherent property of excellent rigidity and outstanding wear resistance established ceramic polishing plate the ideal choice for wafer polishing, grinding and thinning process.

Material Alumina or Silicon Carbide
Shape Convex, flat and concave or per custom request
Size MAXφ50"
Precision Flatness: 1-2μm or less depend on size and shape

Alumina Wafer Polishing Plate

SIC Wafer Polishing Plate