Insperation

 Phone: 510-9181896
Email: wilson.wu@aol.com


Company

With our unique know how of ceramic industry and years immersing in Semi Conductor Industry, Werlchem LLC is at the forefront in the development of materials and components for the demanding environments of semiconductor processing such as chuck table,wafer carriers,CMP grinding and polishing chucks ,end effectors, etc.

Typical materials used by us:
Alumina
Aluminium Nitride
Ceramic/Metal Assemblies
CVD Silicon Carbide
Silicon Carbide (SiC)
Soft Coatings
Zirconia (TZP)
Sapphire
Silicon Carbide
Boron Nitride
Gallium
Indium

 

Typical Applications:
Porous chuck table
E-chucks
Heater Assemblies
Lift Pins
Wafer Clamps
End Effectors
Chamber Rings
Heaters
Power Supplies
CMP Pad Conditioners
RTP Edge Rings
Crystal Growth Crucibles