Product Categories

  • Other Chuck Tables

    Other Chuck Tabless

    With the decades of experience in semiconductor and photonic industry

     
  • Thin Film Vacuum Chuck

    Thin Film Vacuum Chucks

    semiXicon porous ceramic vacuum chucks are available for a wild array

     
  • Wafer Chucks

    Wafer Chuckss

    New, and refurbished, porous ceramic chucks for Disco ,ADT, K&S ,Applied materials

     

About Us

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  • With our unique know how of ceramic industry and years immersing in Semi Conductor Industry, Werlchem LLC is at the forefront in the development of materials and components for the demanding environments of semiconductor processing such as chuck table,wafer carriers,CMP grinding and polishing chucks ,end effectors, etc.


    Typical materials used by us:
    Alumina
    Aluminium Nitride
    Ceramic/Metal Assemblies
    CVD Silicon Carbide
    Silicon Carbide (SiC)
    Soft Coatings
    Zirconia (TZP)
    Sapphire
    Silicon Carbide
    Boron Nitride
    Gallium
    Indium

    Typical Applications:
    Porous chuck table
    E-chucks
    Heater Assemblies
    Lift Pins
    Wafer Clamps
    End Effectors
    Chamber Rings
    Heaters
    Power Supplies
    CMP Pad Conditioners
    RTP Edge Rings
    Crystal Growth Crucibles

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